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ELECTRICAL PROBE SYSTEMS
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Customizable vacuum probing chamber
-40°C to 150°C without LN2
Supports wafer samples up to ø4"
Motorized XYZ sample positioning
6 independent overhead probers
Thermoelectric probe station with externally manipulated probers and vacuum/gas-purge capability.
-25°C to 120°C standard temperature range (-40°C to 160°C available with optional upgrade) without the need for liquid nitrogen.
Customizable number of probers, feedthroughs and temperature sensors
Tabletop design with small footprint integrates with modern instruments and benches
-190°C - 400°C (600°C option available, see HCP621G-MPS)
Fits up to 30 mm samples (optional upgrade for Ø50mm samples available)
Sealed chamber with gas purging and/or vacuum capabilities
4 independent electrical probes with remote mechanical positioning
Up to 7 probers available
Tabletop vacuum probe stage
10 mm - 300 mm wafers and devices
Gas purging or vacuum capability
4 remote positioning electrical probes
-190°C - 1000°C
Thermoelectric mini probe stage
40 mm × 40 mm sample area
Gas purging capability
4 independent electrical probes
-30°C - 120°C (150°C upgrade available)
Optional triaxial connection
Optional extra feedthrough
Mini electrical probe stage
Compact design to fit on Raman, optical microscope, reflection FTIR microscope
28 mm × 30 mm sample area
Sealed chamber with vacuum capability
4 independent electrical probes
-190°C - 400°C
Optional triaxial connection for pA measurement
Optional extra feedthrough
Flagship mini electrical probe stage
Compact design to fit on Raman, optical microscope, reflection FTIR microscope
28 mm × 30 mm sample area
Gas purging capability
-190°C - 600°C
Optional triaxial connection for pA measurement
Optional extra feedthrough
Ultra-Simplified miniature benchtop probing station
No temperature control, no atmospheric control
Up to 8 miniature electrical probers
50mm x 50mm elevated sample area
Inexpensive tool for benchtop probing
Flagship mini electrical probe stage
25 mm × 25 mm sample area
Gas purging capability
RT - 1000°C
Optional triaxial connection
Optional extra feedthrough
Non-magnetic / Hall effect stage
28 mm × 30 mm sample area
Gas purging capability
4 independent electrical probes
-190°C - 600°C
Optional triaxial connection
Optional extra feedthrough
Compact & affordable design for research laboratory
Up to 6 inch wafer testing with 50um electrodes / PAD probes
Precision linear screw drives with zero back lash
LD/LED/PD light intensity / wavelength testing
IV/CV characteristic materials and device testing
High magnification metallographic microscopy
Up to 12 inch wafer testing with 1um electrodes / PAD probes
LD/LED/PD Light intensity / wavelength testing IV/CV
High frequency testing to 300GHz
Customizable vacuum probing chamber
-40°C to 150°C without LN2
Supports wafer samples up to ø4"
Motorized XYZ sample positioning
6 independent overhead probers
Stable structure with quick-lifted and fine-tuned Platen
Suitable for probe card installation and usage
Compatible with high magnification metallographic microscope
Up to 12 inch wafer testing
Precision linear screw drives with zero back lash
Internal circuit / electrode / PAD probe