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Stable structure with quick-lifted and fine-tuned Platen
Suitable for probe card installation and usage
Compatible with high magnification metallographic microscope
Up to 12 inch wafer testing
Precision linear screw drives with zero back lash
Comfortable large handle
Internal circuit / electrode / PAD probe
LD / LED / PD Light intensity / wavelength testing
IV / CV Characteristic testing of materials / devices
High frequency characteristic device testing up to 300GHz
PSH COMPREHENSIVE ANALYTICAL PROBE STATION
PRODUCT INQUIRY -
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SPECIFICATIONS
Model
SH-6
SH-8
SH-12
Dimensions
820mm x 720mm x 890mm
960mm x 850mm x 900mm
1300mm x 920mm x 920mm
Weight
170 kg
230 kg
300 kg
Power
220V, 50 - 60 Hz
Chuck
Size & Rotation
6" & 360°
8" & 360°
12" & 360°
XY Range
6" x 6"
8" x 8"
12" x 12"
Resolution
1 μm
Sample fixed mode
Vacuum adsorption
Electrical design
Electrical floating with banana plug adapters, can be used as backside electrode
Platen
U Shape
6 micropositioners
8 micropositioners
12 micropositioners
Moving range & adjustment mode
Platen can be quickly lifted up and down 6mm for fast probe tip separation
Platen can be fine tuned up and down 25 mm precisely with 1 μm resolution
Microscope
XY Travel range
2" x 2", 50.8 mm
Moving resolution
1 μm
Switching object lens
Microscope tilting 30° manually by lever
Magnification
20 - 4000X
Lens specification
Eyepiece: 10X, Objective lens: 5X, 10X, 20X, 50X, 100X (optional)
CCD Pixel
50W (analog) / 200W (digital) / 500W (digital)
Micropositioning
XYZ Range
8 mm x 8 mm x 8 mm or 12 mm x 12 mm x 12 mm
Mechanical resolution
10 μm, 2 μm, 0.7 μm, 0.1 μm
Current leakage accuracy
10 pA / 100fA (with shielding box)
Cable connectors
Banana head / Alligator clip / Coaxial / Triaxial
Optional Accessories
Chuck quick roll out mechanism
Coaxial / Triaxial chuck
Low current / capacitance test
Shielding box
Vertical fine adjustment
Integral sphere integration
Special adapter
Rotation fine adjustment
Fixture for fiber optic coupler test
Vibration free table
Light intensity / wavelength testing
Fixture for PCB/IC test
Gold-plated chuck
RF testing accessories
Active probe
Microscope tilting mechanism
Microscope pneumatic lifting mechanism
Laser repair with cutting ablation and welding function
Probe clamp
Dark field/DIC/Normarski test/light intensity/wavelength test
IC hotspot detection by LC
High voltage measurement
High current measurement
High/low temperature chuck
Application
Wafer test, photoelectric device test, PCB/IC test, RF test, high voltage and high current measurements