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Compact & affordable design for research laboratory
Up to 6 inch wafer testing with 50um electrodes / PAD probes
Precision linear screw drives with zero back lash
LD/LED/PD light intensity / wavelength testing
IV/CV characteristic materials and device testing

High magnification metallographic microscopy
Up to 12 inch wafer testing with 1um electrodes / PAD probes
LD/LED/PD Light intensity / wavelength testing IV/CV
High frequency testing to 300GHz

Customizable vacuum probing chamber
-40°C to 150°C without LN2
Supports wafer samples up to ø4"
Motorized XYZ sample positioning
6 independent overhead probers

Stable structure with quick-lifted and fine-tuned Platen
Suitable for probe card installation and usage
Compatible with high magnification metallographic microscope
Up to 12 inch wafer testing
Precision linear screw drives with zero back lash
Internal circuit / electrode / PAD probe