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Customizable vacuum probing chamber
-40°C to 150°C without LN2
Supports wafer samples up to ø4"
Motorized XYZ sample positioning
6 independent overhead probers
TP104V-MPS+ // INS2301501
PRODUCT INQUIRY -
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DESCRIPTION
This specialized TP104V-MPS+ is the latest in a series of custom vacuum chamber projects that combine INSTEC precision temperature control with semi-automated semiconductor probing technology. The Thermoelectric heating and cooling chuck inside the TP104V-MPS+ is capable of controlling wafer samples up to 4" in diameter between -40°C and 150°C. The temperature control is achievable without consumable coolant like LN2, making the system highly resource efficient and practical.
6 overhead independently adjustable probers are positioned via external micromanipulators, then the entire thermal chuck and sample is moved in the X, Y and Z directions by precision stepper motors. With this strategy, the overhead probers may be positioned a single time in the probing pattern supported by multiple devices on the same wafer, then the entire wafer is moved around to probe multiple devices without having to re-position the probers or break vacuum.
The access door design allows the thermal chuck to be moved outside the frame of the probe station, allowing for easy sample access. The modular chamber design also makes it extremely easy to add additional, instruments and electrical feedthroughs, or to exchange the standard viewing windows with IR compatible ones.
For more information on INSTEC probing solutions, check out our full Electrical Probing Solutions Catalog!
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VIDEO DEMO