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Miniature benchtop probing station with precision XYZ prober control
No temperature control, no atmospheric control (Optional upgrade to 2" thermal chuck available)
4,6 or 8+ probers, ideal for pads larger than 50um x 50um
50mm x 50mm elevated sample chuck with suction grooves
Cost-effective substitute for full-size probe station
Optional upgrades including electrically floating surface area, sample clips, transmisison aperture and much more!
Latest Production Version - V12.00.00
The P02S-PM-XYZ4 is a simple but robust benchtop probing tool for a variety of applications. Designed to essentially be a super-miniaturized probe station, the XYZ4 is a cost and space effective solution for electrical characterization and testing of singulated semiconductor devices or material samples.
This simplified probe station does not have any active temperature control or atmospheric control and instead focuses on reliability and simplicity. The P02S-PM-XYZ4 supports 4, 6 or *8+ electrical probers, each of which can be precisley positioned via XYZ micromanipulators. The entire probing station is thin enough to be placed under an optical microscope or within a magnetic field for Van Der pauw or Hall-bar hall-effect measurements, making it a simple yet versatile tool.
*8+ Probers requires the P02S-PM+ customizable model
The standard P02S-PM-XYZ4 comes with 1 tungsten-rhenium probe tip (50um tip diameter) and one Coaxial BNC connection per electrical prober. Complete coaxial cables are not included.
The upgraded P02S-PM-XYZ4+ model can be customized to include a range of additional features such as more than 8+ prober options, custom prober layouts, specialized probers such as RF or 4-point, transmission apertures, additional mounting holes, handles, non-magnetic construction for Hall Effect measurments, electrical connections, sample suction grooves, electrically floating sample area and more!
With the P02S-PM-XYZ4+, Instec thermal chucks such as the TC102 or HCC602S can be integrated to add temperature control capabilities, perfect for probing devices inside vacuum chambers, glove-boxes, or in work areas with limited space.
Contact sales@instec.com for more information, and to find out how the P02S-PM-XYZ4 can improve your experiment!
For more information on INSTEC probing solutions, check out our full Electrical Probing Solutions Catalog!
Note: All images and specifications are for reference only, and are subject to change at any time without notice. Always confirm final technical specifications with our sales team before placing an official order.
Temperature Control |
No active temperature control (Optional support for Instec thermal plates/ chucks available by request with P02S-PM-XYZ4+ model) |
Frame Material |
Clear Anodized Aluminum |
Probe Positioning |
Precision XYZ micropositioners. 10mm x 10mm x 10mm fine adjustment range, 10um resolution. 10mm rough adjustment range on prober arm, 10mm rough adjustment on micropositioner base. Probers can reach anywhere within 20mm radius from the center of sample area. 4, 6 or 8+ prober options available |
Connectors |
Female Coaxial BNC connectors 250V 0.5W Maximum Reccomended for DC to 500 MHz signals |
|
Electrically biased surface area |
Grounded sample area (Option for electrically floating surface area/ back-bias with P02S-PM-XYZ4+) |
Optical Access |
Optical access to sample via reflection (Option to add transmission aperture from 2mm to 20mm with P02S-PM-XYZ4+) |
Sample Area |
50mm x 50mm on removable sample block Includes 7mm, 32mm and single-point suction zones for sample fixturing. Reccomended for samples between 1mm x 1mm and 50mm x 50mm. Up to 4x spring-loaded sample clips |
Atmosphere Control |
None |
Frame Cooling |
None |
Mounting |
4x through-holes |
Frame Dimensions |
140mm x 320mm x 23mm (thickness without sample, measured across center) |
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PSM-VP4 multi-zone suction pump Provides a convenient solution for controlling suction zones. Individually selectable zones and built-in suction pump. Highly reccomended for use with Instec thermal chucks and P02S products. |
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P02S-PM Ultra-simplifed miniature probing station with manually positioned probers. Supports 4x, 6x or 8x coaxial or triaxial probers, and up to 2" samples. Great low-cost solution for devices with large electrical contacts (larger than 250um x 250um) or bulk materials. |
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HCP621G-PM Flagship temperature and environmentally controlled probing stage. Supports up to 26mm diameter samples, temperature controlled from -190°C up to 600°C in gas environments. Includes 4x or 6x manually positioned electrical probers good for electrical pads larger than 600um x 600um. Offers a large step-up in performance over the P02S series by controlling temperature, environment, and providing integrated EMI shielding. |
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