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Compatible with high magnification metallographic microscope, with fine tuned movement
All purpose use for academic and industry laboratory research
Up to 12 inch wafer testing with 1um electrodes / PAD probes
Precision linear screw drives with zero back lash
LD/LED/PD Light intensity / wavelength testing
IV/CV Characteristic testing of materials / devices
High frequency characteristic device testing up to 300GHz
PSE WAFER TESTING PROBE STATION
PRODUCT INQUIRY -
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SPECIFICATIONS
Model SE-4
SE-6
SE-8
SE-12
Dimensions
580mm x 620mm x 730mm
640mm x 700mm x 730mm
660mm x 660mm x 700mm
1030mm x 820mm x 730mm
Weight
70 kg
80 kg
85 kg
180 kg
Power
220V, 50 - 60 Hz
Chuck
Size & Rotation
4" & 360°
6" & 360°
8" & 360°
12" & 360°
XY Range
4" x 4"
6" x 6"
8" x 8"
12" x 12"
Z Range
6 mm (fast switching) / 6 mm (fine tuning)
Resolution
10 μm
Sample fixed mode
Vacuum adsorption
Electrical design
Electrical floating with banana plug adapters, can be used as backside electrode
Platen
U Shape
6 micropositioners
8 micropositioners
10 micropositioners
12 micropositioners
Microscope
Moving range
360°, 50.8 mm (2")
Magnification
16 - 100X standard, 200X optional
CCD Pixel
50W (analog) / 200W (digital) / 500W (digital)
Micropositioning
XYZ Range
8 mm x 8 mm x 8 mm / 12 mm x 12 mm x 12 mm
Mechanical resolution
10 μm, 2 μm, 0.7 μm, 0.1 μm
Current leakage accuracy
10 pA, 100 fA
Cable connectors
Banana head / Alligator clip / Coaxial / Triaxial
Optional Accessories
Microscope tilt mechanism
Hot chuck
Coaxial / Triaxial chuck
Low current / capacitance test
Pneumatic lift mechanism
Shielding box
Vertical fine adjustment
Integral sphere integration
Laser cutting and repairing
Special adapter
Rotation fine adjustment
Fixture for fiber optic coupler test
Probe clamp
Vibration free table
Light intensity / wavelength testing
Fixture for PCB/IC test
Dark field/DIC/Normaski test/light intensity/wavelength test interface accessory
Gold-plated chuck
RF testing accessories
Active probe
Liquid crystal analysis package
High voltage measurement package
High current measurement package
Application
IC / LD / LED / PD / PCB / Packaged device / RF testing