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Compact & affordable design for research laboratory
Up to 6 inch wafer testing with 50um electrodes / PAD probes
Precision linear screw drives with zero back lash
LD/LED/PD light intensity / wavelength testing
IV/CV characteristic materials and device testing
PSM MINIATURE ANALYTICAL PROBE STATION
PRODUCT INQUIRY -
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SPECIFICATIONS
Model SM-4
SM-6 MINI
SM-6
Dimensions
400mm x 400mm x 550mm
400mm x 400mm x 550mm
680mm x 530mm x 550mm
Weight
30 kg
35 kg
40 kg
Power
220V, 50 - 60 Hz
Chuck
Size & Rotation
4" & 360°
6" & 360°
6" & 360°
XY Range
4"
4"
6"
Resolution
10 μm
Sample fixed mode
Vacuum adsorption
Electrical design
Electrical floating with banana plug adapters, can be used as backside electrode
Platen
U Shape
6 micropositioners
8 micropositioners
Microscope
Moving range
360°, 50.8 mm
Magnification
16 - 100X standard, 200X optional
CCD Pixel
50W (analog) / 200W (digital) / 500W (digital)
Micropositioning
XYZ Range
12 mm x 12 mm x 12 mm
Mechanical resolution
10 μm, 2 μm, 0.7 μm
Current leakage accuracy
10 pA, 100 fA
Cable connectors
Banana head / Alligator clip / Coaxial / Triaxial
Optional Accessories
Hot chuck
Coaxial / Triaxial chuck
Low current / capacitance testing
Shielding box
Vertical fine adjustment
Integral sphere integration
Special adapter
Rotation fine adjustment
Fixture for fiber optic coupler testing
Vibration free table
Light intensity / wavelength testing
Fixture for PCB/IC testing
Gold-plated chuck
RF testing accessories
Active probe
Application
IC / LD / LED / PD /PCB/ Packaged device / RF testing