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Customizable vacuum probing chamber
Room temp to 1000°C
Independent DC and RF 50Ghz overhead probers
Supports samples up to 50mm x 50mm
XYZR sample positioning
High Temperature RF Probing Chamber HP1000V-MPS+
PRODUCT INQUIRY -
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DESCRIPTION
The HP1000V-MPS+ is a customizable vacuum-probing platform ideal for creating extremely high-temperature conditions for device characterization. The HP1000V-MP+ features 4x overhead DC electrical probers, and 2x High-temp GSG RF probers with unique water-cooling capabilities, designed to push the limits of High-Temp RF probing. Experimental water cooling and heatshielding allow the RF probers to be used a higher temperatures than normal however the exact temperature limits vary depending on the sample and many other factors. Exceed the rated prober temperature limits at your own risk!
An XYZR 4-axis motion platform allows the sample to be moved around relative to the sample, ensuring easy RF probe landing and making it much more convenient to characterize multiple devices on the same sample without breaking vacuum.
The chamber has a 50mm x 50mm Silicon Carbide thermal area that can be heated up to 1000ºC. Optical access through a 42mm diameter optical window, and comprehensive water cooling on the motion platform, chamber lid, and RF probers. Vacuum connections are made through standardized KF vacuum flanges for convenience, and the chamber is rated for a minimum vacuum pressure of at least 10^-3 mBar with most benchtop vacuum pump systems.
Each HP1000V-MPS+ is a total temeprature control solution, including mK2000B Precision temperature controller and a C100W or CW300 water cooling system. Also included with the mK2000B is our InstecApp client software for data logging and visualization, as well as our SCPI programming SDK's which make it easy to integrate temperature control into custom electrical testing software applications.
The -MPS platform is highly customizable, and can optimized for any application. All chamber features, including the number of probers, sample size, additional vacuum ports, motorized vs manual XYZR sample movement, and optical window material can be modified by request.
Contact Sales@Instec.com to talk with our technical sales team to learn more about how the HP1000V-MPS+ system can enable High-temp microelectronic device characterization.
For more information on INSTEC probing solutions, check out our full Electrical Probing Solutions Catalog!