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Square sample area to accommodate various sample sizes and shapes
Better integrate into some experimental workspaces
S (grounded), SF (floating), or ST (triaxial) options
Multi vacuum zones for different wafer sizes
Optional cooling down to 80K
Optional triaxial for pA current measurements
HCC SQUARE WAFER CHUCKS
PRODUCT INQUIRY -
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FEATURES
Surface Options
Standard: clear anodized aluminum
Optional: nickel, zinc, or gold plating
Wafer Vacuum Control
Independent vacuum channels
Custom vacuum holes available
Lift Pin
Optional
Base Cooling
Integrated base cooling via hose barb ports with optional chiller system
Mounting
Probe station mounting capability
Custom adapter options
Surface Electrical Options
grounded (S), floating (SF), or triaxial (ST) surfaces
BNC Connector Options
Coaxial, floating, or triaxial BNC
Temperature Control
mK2000 with programmable precision switching PID method
Optional LVDC PID method to minimize electrical noise
Temperature Sensor
100 Ω Platinum RTD
Temperature Resolution
0.01°C
Temperature Stability
±0.05°C (>25°C) and ±0.1°C (<25°C)
Temperature Uniformity
±2% or better
Power Supply
115 V or 230 V depending on region
Software
Windows software to record and export temperature-time data
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MODELS
Model
Size
Square
Fits Samples
Weight（kg）
Temperature Range
Maximum Rate at 100°C
MIN
MAX
MIN
MAX
Heating
Cooling
HCC602S 55mm 3mm 50mm 0.4 -190°C
600°C
+30°C / min -10°C / min HCC212/312S
55 mm
8mm
50mm
0.4
-190°C
200/300°C
+30°C / min
-10°C / min
HCC214/314S
105 mm
15mm
100mm
1.2
-120°C
200/300°C
+30°C / min
-20°C / min
HCC216/316S
155 mm
40mm
150mm
3.0
-100°C
200/300°C
+30°C / min
-10°C / min
HCC218/318S
205 mm
40mm
200mm
5.0
-80°C
200/300°C
+10°C / min
-5°C / min