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ELECTRICAL PROBE SYSTEMS
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THERMAL PLATES
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LIQUID CRYSTAL SYSTEMS
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ABOUT
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Thermoelectric cooling and heating
Square shape accommodates various sample sizes and shapes
Cooling down to -30°C without using LN2
Multi vacuum zones for different wafer sizes
Optional triaxial for pA current measurements
TEC BASED SQUARE WAFER CHUCKS
PRODUCT INQUIRY -
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FEATURES
Surface Options
Standard: clear anodized aluminum
Optional: nickel, zinc, or gold plating
Wafer Vacuum Control
Independent vacuum channels
Custom vacuum holes available
Base Cooling
Integrated base water-cooling
Mounting
Probe station mounting capability
Custom adapter options
Surface Electrical Options
grounded (S), floating (SF), or triaxial (ST) surfaces (triaxial requires customization)
BNC Connector Options
Coaxial, floating, or triaxial BNC (triaxial requires customization)
Temperature Control
LVDC output temperature controller to minimize electrical noise
Temperature Range -30°C to 90°C (optional 120°C temperature limit) Temperature Sensor
100 Ω Platinum RTD
Temperature Resolution
0.01°C
Temperature Stability
±0.05°C
Power Supply
Universal power input
Software
Windows software to record and export temperature-time data
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MODELS
Model
SIZE
mm
Fits Samples
Weight kg
Temperature Range
Maximum Rate at 100°C
MIN
MAX
MIN
MAX
Heating
Cooling
TC102S
84x47x20
12mm
50mm
0.4
-30°C
120°C
+40°C / min
-15°C / min
TC104S
132X110X28
12mm
110mm
1.0
-30°C
120°C
+20°C / min
-10°C / min
TC106S
200X160X30
40mm
160mm
3.0
-30°C
120°C
+15°C / min
-6°C / min
TC108S
250X210X35
40mm
210mm
10
-30°C
120°C
+12°C / min
-4°C / min
TC10CS
355X315X40
100mm
315mm
20
-30°C
120°C
+7°C / min
-4°C / min