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Round thermal wafer chucks
Designed for wafer handling
Modern electrical probing and testing
Multi vacuum zones for different wafer sizes
Optional cooling down to 80K
Optional triaxial for pA current measurements
HCC ROUND WAFER CHUCKS
PRODUCT INQUIRY -
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FEATURES
Surface Options
Standard: clear anodized aluminum
Optional: gold plating
Wafer Vacuum Control
Independent vacuum channels
Custom vacuum holes available
Lift Pin
Optional
Base Cooling
Integrated base cooling via hose barb ports with optional chiller system
Mounting
Probe station mounting capability
Custom adapter options
Surface Electrical Options
grounded (R), floating (RF), or triaxial (RT) surfaces
BNC Connector Options
Coaxial, floating, or triaxial BNC
Temperature Control
mK2000 with programmable precision switching PID method
Optional LVDC PID method to minimize electrical noise
Temperature Sensor
100 Ω Platinum RTD
Temperature Resolution
0.01°C
Temperature Stability
±0.05°C (>25°C) and ±0.1°C (<25°C)
Power Supply
115 V or 230 V depending on region
Flatness
±25um
Software
Windows software to record and export temperature-time data
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MODELS
Model
Dimensions
Fits Samples
Weight kg
Temperature Range
Maximum Rate
MIN
MAX
MIN
MAX
Heating
Cooling
HCC206R/RF
200 mm x 176 mm x 32.62 mm
45mm
150mm
2.0
-100°C
200°C
+30°C/min
-15°C/min
HCC206RT
200 mm x 176 mm x 32.62 mm
45mm
150mm
2.5
-80°C
200°C
+15°C/min
-8°C/min
HCC306R/RF
200 mm x 176 mm x32.62 mm
45mm
150mm
2.0
-100°C
300°C
+30°C/min
-15°C/min
HCC306RT
200 mm x 176 mm x 32.62 mm
45mm
150mm
2.5
-80°C
300°C
+15°C/min
-8°C/min
HCC208R/RF
250 mm x 200 mm x 32.5 mm
100mm
200mm
3.5
-80°C
200°C
+15°C/min
-5°C/min
HCC208RT
250 mm x 200 mm x 32.5 mm
100mm
200mm
4.0
-80°C
200°C
+15°C/min
-3.5°C/min
HCC308R/RF 250 mm x 200 mm x 32.5 mm
100mm
200mm
3.5
-80°C
300°C
+15°C/min
-5°C/min
HCC308RT
250 mm x 200 mm x 32.5 mm
100mm
200mm
4.0
-80°C
300°C
+15°C/min
-3.5°C/min
HCC20CR/RF
365 mm x 325 mm x 40 mm
100mm
300mm
8.0
-60°C
200°C
+15°C/min
-1.5°C/min
HCC20CRT
365 mm x 325 mm x 40 mm
100mm
300mm
10.0
-60°C
200°C
+12°C/min
-1.2°C/min
HCC30CR/RF
365 mm x 325 mm x 40 mm
100mm
300mm
8.0
-60°C
300°C
+15°C/min
-1.5°C/min
*custom 400°C options available