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ABOUT
Standalone 1-zone suction pump for securing samples to thermal chucks
-75 kPa maximum suction pressure
Universal input voltage
The VP1 suction pump is a convenient tool for securing thin samples to Instec chucks. The dry vacuum pump is capable of up to 75kPa of suction pressure, securing even large wafers or glass substrates firmly to the chuck surface, securing the samples for electrical probing, and improving thermal contact. The pump does not require any maintinence and runs at only 40 dB of noise.
Maximum Suction Power |
-75 kPa max pressure |
Maximum gas-flow rate |
10L/ min |
Minimum Temperature |
-196°C |
Maximum Temperature |
200°C |
Power Supply |
Universal AC input 110V - 220V 50hz-60hz [20W] |
Chassis Dimensions |
192mm x 100mm x 135mm |