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Customized TC106SF+ thermoelectric wafer chuck
Temperature controlled from 25 °C to 100 °C under 40W heating load
Gold-plated 150mm by 150mm sample area with custom 4-zone vaccum channel layout
Electrically conductive sample area with BNC input for sample biasing
TC106SF+ // INS2103404
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DESCRIPTION
This customized TC106SF+ was designed for solar-panel R&D. The massive 150mm by 150mm sample area can accomodate large solar cells, and can be used to apply an electrical bias while securing the sample via the 4-zone vaccum channels. The chuck has an upper temperature limit of 100 °C, but more importantly, it can maintain a temperature of 25 °C while under a 40W heat load such as a solar simulator. Temperature control is accomplished using thermoelectric heating/cooling elements, which provide exceptional temperaure control and precision compared to water or LN2 cooling.