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HCP621G-PM with customized Elipsometry lid
Temperature controlled electrical probing from -190°C - 600°C with liquid nitrogen cooling option
KF 16 flanges for chamber evacuation or gas-purge
4 co-axial electrical feedthroughs with manually positioned electrical probers
HCP621G-PM+ // INS2003341
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DESCRIPTION
This customized HCP621G-PM+ was designed for electrical probing with simultenieous elipsometry measurments. The thermal area supports precision temperature control from -190°C (with optional LN2 cooling system) to 600°C. The plate has two KF-16 feedthroughs for gas-purge, and full frame cooling to keep the outside of the chassis near room-temperaure even when heating samples up to 600°C. The custom elipsometry lid has both side-access windows, and a top-access window, giving compatability with a wide range of optical instruments. All windows are field replaceable, so different window materials can be used to accomodate different optical experiments. 4 coaxial electrical feedthroughs connect to manually-positioned electrical probers, ideal for pad sizes larger than 100 microns.