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Compact plate for Ellipsometry applications
70° incident & emergent light angles
-190°C to 600°C with liquid nitrogen cooling option
28 mm × 30 mm sample area
Gas-tight chamber
HCP621G-ELP
PRODUCT INQUIRY -
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DESCRIPTION
The HCP621G-ELP gas tight plate is designed for ellipsometry applications where both thermal and atmospheric control is critical. Using a silver heating and cooling block, this plate provides a wide temperature range with precise thermal uniformity. The gas tight chamber provides a closed chamber to eliminate oxidation, aid in humidity studies, or conserve expensive reaction gasses.
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THERMAL FEATURES
Temperature Control
mK2000 with programmable precision switching PID method
Thermal Block
Silver
Sample Thermal Cover
Optional removable Inner sample cover with additional window
Temperature Minimum
-190°C (with optional liquid N2 cooling)
Temperature Maximum
600°C
Temperature Sensor
100 Ω Platinum RTD
Maximum Heating Rate
+150°C per minute at 100°C
Maximum Cooling Rate
-50°C per minute at 100°C
Minimum Heating and Cooling Rate
±0.01°C per minute
Temperature Resolution
0.01°C
Temperature Stability
±0.05°C (>25°C), ±0.1°C (<25°C)
Power supply
Universal power input
Software
Windows compatible software to record and export temperature-time data; remotely control system via VCP connection (Virtual Comm Port)
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OPTICAL FEATURES
Optical access
Reflection capability only
Optical windows
Removable and exchangeable windows permit full-spectrum transparency
Minimum Objective Working Distance
13.2 mm
Top Window
Ø27 mm
Incident light angle
70.0° from normal
Emergent light angle
70.0° from normal
Window Defrost
Integrated external window defrost
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STRUCTURAL FEATURES
Sample Area
Ø30 mm
Chamber Height
4.3 mm
Atmosphere Control
Sealed chamber with gas purging capability to control humidity, condensation, and oxidation
Frame Cooling
Integrated frame cooling with optional chiller system
Mounting
Horizontal capability
Frame Dimensions
97 mm x 84 mm x 36.5 mm
Weight
500 g