WAFER CHUCKS

  • Thermal chuck systems are essential for probing, characterization, inspection and failure analysis of semiconductor wafers and devices. INSTEC incorporates its many decades of thermal control expertise into its industry-leading thermal chucks. Options include ​20mm to 300mm diameter or square standard sampling areas (custom to 600mm). Independent concentric surface vacuum groves provide sample security. Precision thermal control from -190ºC to 600ºC (custom up to 1500ºC) is accompanied with ±0.1ºC temperature uniformity and stability. Grounded, coaxial (floating), and triaxial (guarded) chuck surface options provide ultimate electrical control in a variety of applications. Optional triaxial heaters helps with electrical noise reduction.
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