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TC102S & TC104S Peltier Based Thermal Chucks
 
Features
· Programmable Precision Temperature Control from -25°C to 90°C
· Peltier Based Thermal Chuck
· Accommodates Up To 100 mm Diameter Wafer
· Low Surface Temperature Gradients
· Independent Vacuum Channels for Small or Large Wafer Sizes
· Thin Enough for Easy Probe Station Integration
· Easy Sample Loading with Raised Chuck Surface
· Controlled Fast Heating and Cooling Rate
· Optional Upper Temperature Limit of 120°Available
Technical Specifications
Temperature Resolution
0.01°C with mK1000
Temperature Stability
±0.05°C at 37°C with mK1000 (better stability optional)
Temperature Uniformity
±0.1°C per cm (better temperature uniformity available)
Minimum Heating and Cooling Rate
±0.1°C per hour
Temperature Control Method
PID with Linear Variable DC
Temperature Control Sensor
100 Ω Platinum RTD
Surface Flatness
15 µm at ambient temperature
 

- Information on Temperature Controllers

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