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HCC602 High Temperature Hot & Cold Chuck
Instec's HCC602 Chuck is designed for semiconductor applications where a wide temperature range is needed. Using a pure silver heating and cooling block, the HCC602 hot and cold chuck provides incredible temperature range and exceptional thermal uniformity.
· Programmable Precision Temperature Control from -190°C to 600°C
· Optional Swing Cover With:
Large Viewing Aperture
Removable and Exchangeable Windows
Dual Pane Windows for Better Thermal Isolation
Integrated Aperture Window Defrost System
Variable Sample Chamber Height
Gas Purge Sample Chamber
· Low Surface Temperature Gradients
· Thin Design for Easy Probe Station Integration
· Controlled Fast Heating and Cooling Rate
· Optional Microscope Rotational Stage Mounting Accessories
Technical Specifications
Temperature Range
-190°C to 600°
Below ambient operation requires optional cooling accessory
Temperature Resolution
0.01°C with mK1000
Temperature Stability
±0.05°C at 100°C with mK1000 (better stability optional)
Temperature Uniformity
±0.1°C per cm
Minimum Heating and Cooling Rate
±0.1°C per hour
Maximum Heating Rate
+150°C per minute at 100°C
Maximum Cooling Rate
-100°C per minute at 100°C (when using LN2-P4)
Temperature Control Method
Switching PID (PID with Linear Variable DC optional)
Temperature Control Sensor
100 Ω Platinum RTD
Sample Area
35 mm x 35 mm
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