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Hot and Cold Chucks

Thermal chuck systems are essential for probing, characterization, inspection and failure analysis of semiconductor wafers and chips, and other material research applications.

The standard sizes of Instec hot and cold chucks range from 20mm to 300mm (custom sizes are available up to 600mm). Standard models have temperature ranges of up to -190ºC to 600ºC, with higher temperature limits available for custom hot chucks.

Instec thermal chucks provide ultra temperature uniformity and stability (better than ±0.1ºC). An optional triaxial heater is available for eliminating electrical noise. Grounded, coaxial (floating) and triaxial (guarded) chuck surfaces are available. Instec chucks are available in two shapes, round chucks and square chucks, to meet different application needs.

Instec's basic thermal chuck systems consist of a thermal wafer vacuum chuck, a standalone temperature controller, and WinTemp - a Windows based software. 

Model
Temperature Range1
Sample Area
Triaxial
Square
Round
Peltier Cooling2
-100°C to 200°C
152 mm diameter
-
-
-
-100°C to 200°C
152 mm diameter
-
-
-100°C to 310°C
152 mm diameter
-
-
-
-100°C to 310°C
152 mm diameter
-
-
-80°C to 200°C
203 mm diameter
-
-
-
-80°C to 200°C
203 mm diameter
-
-
-80°C to 310°C
203 mm diameter
-
-
-
-80°C to 310°C
203 mm diameter
-
-
-60°C to 200°C
304 mm diameter
-
-
-
-60°C to 200°C
304 mm diameter
-
-
-60°C to 310°C
304 mm diameter
-
-
-
-60°C to 310°C
304 mm diameter
-
-
-120°C to 200°C
101 mm x 101 mm
-
-
-
-120°C to 310°C
101 mm x 101 mm
-
-
-
-100°C to 200°C
152 mm x 152 mm
-
-
-
-100°C to 310°C
152 mm x 152 mm
-
-
-
-80°C to 200°C
203 mm x 203 mm
-
-
-
-80°C to 310°C
203 mm x 203 mm
-
-
-
-190°C to 600°C
35 mm x 35 mm
-
-
-
-100°C to 310°C
48 mm x 60 mm
-
-
-
-25°C to 90°C
40 mm x 40 mm
-
-
-25°C to 90°C
100 mm x 100 mm
-
-
 
  Some models offer optional wider temperature range. Please contact Instec with your requirement or refer to the detailed technical specification of the model.
  Peltier Cooling: Thermal Chuck model uses Peltier for cooling and does not require additional sample cooling accessories (e.g. LN2-SYS Liquid Nitrogen Cooling Accessory, WP115C/WP230C Water Cooling Accessory) for below ambient operations.
 
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